本文件规定了一种辉光放电光学发射光谱法，用于测定铁基衬底上单个和金属纳米层的厚度和单位面积质量。 该方法适用于单层和金属纳米层，10nm至100在铁基衬底上。各层的金属元素为Cr、Ni、Ti、Mn和Al。根据本文件可确定的其他元素为P和S。

This document specifies a glow discharge optical emission spectrometric method for the determination of the thickness and mass per unit area of single and metallic nanolayers on iron-based substrates. This method is applicable to single and metallic nanolayers, 10？nm to 100？nm thick, on iron-based substrates. The metallic elements of the layers are Cr, Ni, Ti, Mn and Al. Other elements that can be determined according to this document are P and S.