IEC 62047-6:2009规定了在恒定力范围或恒定位移范围内，长度和宽度小于1mm，厚度在0.1μm和10μm之间的薄膜材料的轴向拉伸疲劳试验方法。薄膜被用作MEMS和微机械的主要结构材料。MEMS、微机械等的主要结构材料具有特殊特性，例如典型尺寸为几微米，通过沉积进行材料制造，以及通过非机械加工（包括光刻）进行试件制造。本国际标准规定了微小尺寸光滑试样的轴向力疲劳试验方法，从而保证了与特殊特性相对应的精度。 试验在室温、空气中进行，并沿纵轴向试样施加荷载。

IEC 62047-6:2009 specifies the method for axial tensile-tensile force fatigue testing of thin film materials with a length and width under 1 mm and a thickness in the range between 0,1 μm and 10 μm under constant force range or constant displacement range. Thin films are used as main structural materials for MEMS and micromachines. The main structural materials for MEMS, micromachines, etc., have special features, such as typical dimensions of a few microns, material fabrication by deposition, andtest piece fabrication by means of non-mechanical machining, including photolithography. This International Standard specifies the axial force fatigue testing methods for micro-sized smooth specimens, which enables a guarantee of accuracy corresponding to the special features. The tests are carried out at room temperatures, in air, with loading applied to the test piece along the longitudinal axis.