Cleanrooms and associated controlled environments - Part 16: Energy efficiency in cleanrooms and separative devices (ISO 14644-16:2019)
洁净室和相关的受控环境 - 第16部分:提高洁净室和清洁空气设备能源效率的实践守则
发布日期:
2019-06-19
实施日期:
2019-06-19
本标准提出了根据EN ISO 14644-1分类的降低能源消耗和保持新旧洁净室和洁净空气装置的能源效率的建议
This document gives guidance and recommendations for optimizing energy usage and maintaining energy efficiency in new and existing cleanrooms, clean zones and separative devices. It provides guidance for the design, construction, commissioning and operation of cleanrooms.
This document covers all cleanroom-specific features and can be used in different areas to optimize energy use in electronic, aerospace, nuclear, pharmaceutical, hospital, medical device, food industries and other clean air applications.
It also introduces the concept of benchmarking for the performance assessment and comparison of cleanroom energy efficiencies, while maintaining performance levels to ISO 14644 requirements[2][3].