作为污染控制计划的一部分，本文件给出了洁净室中一个或多个脆弱表面上颗粒沉积速率测量结果的解释和应用方向。它提供了一些关于如何影响颗粒沉积速率和降低易受损伤表面上颗粒污染风险的说明。购买本文件时可获得的所有当前修订均包含在购买本文件中。

This document gives direction on the interpretation and application of the results of the measurement of particle deposition rate on one or more vulnerable surfaces in a cleanroom as part of a contamination control programme. It provides some instructions on how to influence the particle deposition rate and reduce the risk of particle contamination on vulnerable surfaces.All current amendments available at time of purchase are included with the purchase of this document.