Cleanrooms and associated controlled environments -- Part 1: Classification of air cleanliness by particle concentration
洁净室及相关受控环境第1部分:按颗粒浓度对空气清洁度的分类
发布日期:
2019-01-01
JIS B 9920-1:2019根据洁净室和洁净区中的空气颗粒物浓度以及JIS B 9917-7中定义的分离装置,规定了空气清洁度的分类。
JIS B 9920-1:2019 specifies the classification of air cleanliness in terms of concentration of airborne particles in cleanrooms and clean zones, and separative devices as defined in JIS B 9917-7.