Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
洁净室和相关控制环境 - 第2部分:通过颗粒浓度提供与空气清洁度相关的洁净室性能的监测
发布日期:
2015-12-09
ISO 14644-2:2015根据测量或影响空气中颗粒物浓度的参数,规定了与颗粒物浓度有关的洁净室或洁净区性能监测计划的最低要求。
ISO 14644-2:2015未涉及工程系统振动或一般维护等方面的状态监测。它不提供对规定的下限粒径范围(0.1μm至5μm)之外的颗粒总体的监测。超细颗粒(小于0.1μm的颗粒)的浓度将在单独的标准中解决。
ISO 14644-2:2015 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.
ISO 14644-2:2015 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 μm to 5 μm. Concentrations of ultrafine particles (particles smaller than 0,1μm) will be addressed in a separate standard.