1.1 本指南使X射线光电子能谱（XPS）用户熟悉各种电荷控制和电荷转移参考技术，这些技术用于从绝缘样品表面获取和解释XPS数据，并提供向客户或文献中报告所用方法所需的信息。 1.2 本指南旨在适用于XPS中的电荷控制和电荷参考技术，不一定适用于电子激发系统。 1.3 以国际单位制表示的数值应视为标准值。本标准不包括其他计量单位。 1.4 本标准并非旨在解决与其使用相关的所有安全问题（如有）。本标准的用户有责任在使用前制定适当的安全和健康实践，并确定监管限制的适用性。 ====意义和用途====== 5.1 从XPS光谱中峰的能量位置变化中获取化学信息是XPS作为表面分析工具的主要用途。表面电荷的作用是移动光谱峰，与它们与同一表面上其他元素的化学关系无关。 为了消除表面电荷对峰位置和峰形状的影响，开发了几种经验方法，旨在帮助解释XPS峰位置，确定表面化学，并允许比较同一元素的导电和非导电系统的光谱。假设光谱仪在非绝缘样品上通常工作正常（见实践） E902 ). 5.2 虽然现在已经开发出高度可靠的方法来稳定大多数材料的XPS分析过程中的表面电位( 5. , 6. )在所有情况下，都没有开发出单一的方法来处理表面电荷( 10 , 11 ). 对于绝缘子，任何控制或参考系统的适当选择将取决于样品的性质、仪器和所需的信息。适当使用电荷控制和参考技术将产生更一致、更可再现的数据。强烈敦促研究人员报告已使用的控制和参考技术，用作标准的特定峰和结合能（如有），以及确定最佳结果时应用的标准，以便进行适当的比较。

1.1 This guide acquaints the X-ray photoelectron spectroscopy (XPS) user with the various charge control and charge shift referencing techniques that are and have been used in the acquisition and interpretation of XPS data from surfaces of insulating specimens and provides information needed for reporting the methods used to customers or in the literature. 1.2 This guide is intended to apply to charge control and charge referencing techniques in XPS and is not necessarily applicable to electron-excited systems. 1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard. 1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. ====== Significance And Use ====== 5.1 The acquisition of chemical information from variations in the energy position of peaks in the XPS spectrum is of primary interest in the use of XPS as a surface analytical tool. Surface charging acts to shift spectral peaks independent of their chemical relationship to other elements on the same surface. The desire to eliminate the influence of surface charging on the peak positions and peak shapes has resulted in the development of several empirical methods designed to assist in the interpretation of the XPS peak positions, determine surface chemistry, and allow comparison of spectra of conducting and non-conducting systems of the same element. It is assumed that the spectrometer is generally working properly for non-insulating specimens (see Practice E902 ). 5.2 Although highly reliable methods have now been developed to stabilize surface potentials during XPS analysis of most materials ( 5 , 6 ), no single method has been developed to deal with surface charging in all circumstances ( 10 , 11 ). For insulators, an appropriate choice of any control or referencing system will depend on the nature of the specimen, the instruments, and the information needed. The appropriate use of charge control and referencing techniques will result in more consistent, reproducible data. Researchers are strongly urged to report both the control and referencing techniques that have been used, the specific peaks and binding energies used as standards (if any), and the criteria applied in determining optimum results so that the appropriate comparisons may be made.