Cleanrooms and associated controlled environments, Part 1: Classification of air cleanliness by particle concentration
洁净室和相关受控环境第1部分:按颗粒浓度对空气清洁度的分类
发布日期:
2017-12-13
采用ISO 14644-1:2015,以洁净室和洁净区内空气颗粒物的浓度为依据,规定空气清洁度的分类;以及as/NZS ISO 14644.7:2006中定义的分离装置。
Adopts ISO 14644-1:2015 to specify the classification of air cleanliness in terms of concentration of airborne particles in cleanrooms and clean zones; and separative devices as defined in AS/NZS ISO 14644.7:2006.