在70年代的十年间，美国的高科技微电子行业经历了巨大的发展。尽管其他国家，尤其是日本，已经开始挑战这一领先地位，但美国仍然是该行业的世界领先者。这种增长的一个主要原因是组件的微型化降低了成本，从而产生了越来越大的市场。与10年前相比，电子设备的小型化导致了对清洁环境的需求增加，并使洁净室投资增加了一个数量级。清洁的环境在许多电子制造领域发挥着重要作用。 这些不同领域的部分清单可能如下:A.半导体制造b。计算机大容量存储制造。组件制造，d.植入式电子设备E。印刷电路。综上所述，半导体和大容量存储制造业加大了对清洁空气环境的投资，原因有两个:第一，这些产品的市场非常大；第二，污染问题是影响产品拒收率的一个非常重要的因素。本文将讨论与微电子制造洁净室相关的一些问题，以及污染和空调问题的各种解决方案。 引文:俄亥俄州辛辛那提ASHRAE学报第87卷第2部分研讨会

High technology microelectronics has experienced tremendous growth in the United States during the decade of the 70's. It is still an industry where the U.S. is the world leader even though other countries, most notably Japan, have begun to challenge that lead. One major reason for this growth has been the micro-miniaturization of components reducing costs and thereby producing, ever larger markets. This miniaturization of electronic devices has resulted in increased demand for clean environments and in an order of magnitude increase in clean room investment compared to 10 years ago.A clean environment plays a major role in many of the electronic manufacturing areas. A partial listing of these different areas might be as follows:a. semiconductor manufacturingb. computer mass storage manufacturingc. component manufacturing,d. implantable electronic devicese. printed circuitsf. general assemblyOf the above, semiconductor and mass storage manufacturing invest more heavily in clean air environments for two reasons : first, the market for these products is very large and, second, the contamination, problem is a very significant factor in the rejection rate of the product.This, paper will deal with some of the problems associated with clean rooms for microelectronics manufacturing and the various solutions to the problems of contamination and air conditioning.