BS IEC 62047-31:2019规定了一种测量界面应力的四点弯曲试验方法 层状微机电系统中最弱界面的粘着能 （MEMS）基于断裂力学的概念。在各种MEMS设备中，有 许多层状材料的界面及其粘附能对材料的可靠性至关重要 MEMS设备。交叉引用:IEC 62047-2:2006IEC 62047-3:2006购买本文件时可获得的所有现行修改件均包含在购买本文件中。

BS IEC 62047-31:2019 specifies a four-point bending test method for measuring interfacial adhesion energy of the weakest interface in the layered micro-electromechanical systems (MEMS) based on the concept of fracture mechanics. In a variety of MEMS devices, there are many layered material interfaces, and their adhesion energies are critical to the reliability of the MEMS devices.Cross References:IEC 62047-2:2006IEC 62047-3:2006All current amendments available at time of purchase are included with the purchase of this document.