ISO 11505:2013描述了辉光放电光发射光谱法（GD-OES）测定表层薄膜厚度、单位面积质量和化学成分的方法。 它仅限于对GD-OES定量的一般程序的描述，不直接适用于具有各种厚度和待测定元素的单个材料的定量。

ISO 11505:2013 describes a glow discharge optical emission spectrometric (GD-OES) method for the determination of the thickness, mass per unit area and chemical composition of surface layer films. It is limited to a description of general procedures of quantification of GD-OES and is not applicable directly for the quantification of individual materials having various thicknesses and elements to be determined.