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产品几何技术规范(GPS) 光学共焦显微镜计量特性及测量不确定度评定导则 Geometrical product specifications (GPS)—Metrological characteristics and guide to uncertainty of measurement for optical confocal microscopes
发布日期: 2017-11-01
实施日期: 2018-05-01
本标准描述了光学共焦显微镜在宏观或微观三维表面形状测量中的计量特性,并规定了测量不确定度评定的横向和轴向测量结果的示值读取方法。本标准适用于工业测量光学共焦显微镜
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