BS EN ISO 14644-15:2017提供了评估化学气载清洁度的要求和指南 预计用于洁净室和相关受控区域的设备和材料 根据化学浓度与ISO清洁度等级标准相关的环境 （参见ISO 14644-8）。交叉引用:ISO 14644-8:2013 ED2ISO 16000-6ISO 14644-10AIR1167IEST-RP-CC013SEMI F70-0611ISO 14644-1JIS B 9926ISO 8573-8ISO 16000-9ISO 2889SEMI E137-0705IEST-RP-CC002VDI 2083-9.1SEMI G67-0996ISO 14644-14IEST-RP-CC026。2SEMI E49-1104SEMI F28-1103购买时可用的所有现行修订版均包含在本文件的购买中。

BS EN ISO 14644-15:2017 provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (see ISO 14644-8).Cross References:ISO 14644-8:2013 ED2ISO 16000-6ISO 14644-10AIR1167IEST-RP-CC013SEMI F70-0611ISO 14644-1JIS B 9926ISO 8573-8ISO 16000-9ISO 2889SEMI E137-0705IEST-RP-CC028IEST-RP-CC002VDI 2083-9.1SEMI G67-0996ISO 14644-14IEST-RP-CC026.2SEMI E49-1104SEMI F28-1103All current amendments available at time of purchase are included with the purchase of this document.