BS ISO 13083:2015描述了一种测量图像空间（横向）分辨率的方法 扫描电容显微镜（SCM）或扫描扩展电阻显微镜（SSRM）， 它被广泛应用于成像中的载流子分布和其他电学性质 半导体器件。这种方法需要使用锋利的人工制品。交叉引用:ISO 18115-2ISO 18516购买本文件时可获得的所有现行修订均包含在购买本文件中。

BS ISO 13083:2015 describes a method for measuring the spatial (lateral) resolution of scanning capacitance microscopes (SCMs) or scanning spreading resistance microscopes (SSRMs), which are widely used in imaging the distribution of carriers and other electrical properties in semiconductor devices. The method involves the use of a sharp-edged artefact.Cross References:ISO 18115-2ISO 18516All current amendments available at time of purchase are included with the purchase of this document.