Gas analysis - Preparation of calibration gas mixtures using dynamic methods - Part 7: Thermal mass-flow controllers (ISO 6145-7:2018)
气体分析 - 使用动态方法制备校准气体混合物 - 第7部分:热质量流量控制器
发布日期:
2018-12-19
实施日期:
2018-12-19
ISO 6145是一系列文件,涉及用于制备校准气体混合物的各种动态方法。本文件规定了使用热质量流量控制器从名义纯气体或气体混合物连续制备标定气体混合物的方法。本方法适用于制备非反应性物质的混合物,即与热质流量控制器或辅助设备中的流道结构材料不反应的混合物。如果使用该方法制备校准气体混合物,则最佳性能如下:通过将标准不确定度乘以覆盖系数k=2获得的相对扩展测量不确定度U不大于2%。如果使用预混合气体代替纯气体,则可获得低于10-6的摩尔分数。质量流量的测量不是绝对的,流量控制器需要独立校准。该方法的优点是可以连续制备大量标定气体混合物,并且如果使用适当数量的热质量流量控制器,则可以像二元混合物一样容易制备多组分混合物。注:基于热质量流量控制器的气体混合系统,以及包括计算机化和自动控制设施在内的一些系统,在市场上都有售。
ISO 6145 is a series of documents dealing with various dynamic methods used for the preparation of calibration gas mixtures. This document specifies a method for continuous preparation of calibration gas mixtures, from nominally pure gases or gas mixtures by use of thermal mass-flow controllers. The method is applicable to preparation of mixtures of non-reacting species, i.e. those which do not react with any material of construction of the flow path in the thermal mass-flow controller or the ancillary equipment.
If this method is employed for preparation of calibration gas mixtures the optimum performance is as follows: the relative expanded measurement uncertainty U, obtained by multiplying the standard uncertainty by a coverage factor k = 2, is not greater than 2 %.
If pre-mixed gases are used instead of pure gases, mole fractions below 10−6 can be obtained. The measurement of mass flow is not absolute and the flow controller requires independent calibration.
The merits of the method are that a large quantity of the calibration gas mixture can be prepared on a continuous basis and that multi-component mixtures can be prepared as readily as binary mixtures if the appropriate number of thermal mass-flow controllers is utilized.
NOTE Gas blending systems, based upon thermal mass-flow controllers, and some including the facility of computerization and automatic control, are commercially available.