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Standard Practice for Determining Vacuum Chamber Gaseous Environment Using a Cold Finger 使用冷手指确定真空室气体环境的标准实践
发布日期: 2021-04-01
1.1 本规程涵盖了一种收集材料样品的技术,这些材料是真空室残余气体环境的一部分。该实践使用了一种被指定为“冷指”的装置,该装置放置在待采样的环境中,并进行冷却,以使环境成分保留在冷指表面。 1.2 本实施规程涵盖了一种从冷指中获取样品并确定从冷指中移除的材料重量的方法。 1.3 本实施规程包含有关分析样品以识别组成样品的成分的方法的建议。 1.4 通过确定构成样品的物种,本规程可用于帮助确定成分来源,以及样品是否通常代表从真空室本身类似获得的样品。 1.5 本实践涵盖了可用于实践的替代方法和用法。 1.6 分子通量各向异性的程度显著影响了将此程序确定的特性归因于真空室环境的保证。 1.7 冷指的温度显著影响收集的材料的数量和种类。 1.8 单位- 以国际单位制表示的数值应视为标准值。本标准不包括其他计量单位。 1.9 本标准并非旨在解决与其使用相关的所有安全问题(如有)。本标准的用户有责任在使用前制定适当的安全、健康和环境实践,并确定监管限制的适用性。 有关具体的警告声明,请参阅第节 8. . 1.10 本国际标准是根据世界贸易组织技术性贸易壁垒(TBT)委员会发布的《关于制定国际标准、指南和建议的原则的决定》中确立的国际公认标准化原则制定的。 ====意义和用途====== 5.1 当在真空室中没有测试项目的情况下使用时(例如在烘烤操作期间),考虑到关键参数(例如,暴露长度、真空室和冷指的温度、各向异性等)可能相关,该程序可用于评估真空室相对于来自相同或其他真空室的其他数据的性能。 5.2 该程序可用于评估残渣中发现的材料对放置在真空室中的物品的影响。 5.3 该程序可用于描述先前测试对真空室内残余气体的影响。 5.4 通过选择将冷却剂引入冷指的时间,可以表征测试选定部分期间存在的环境。这可用于确定某些真空室程序(如烘焙)的相对效率- 出来 5.5 该程序可用于确定在冷指上冷凝的测试项目排气产物。 5.6 该程序可用于确定真空室的相对清洁度。 5.7 一般来说,在将程序结果应用于真空室时,必须考虑真空室内分子通量的各向异性。 5.8 该程序对形成冷凝液的气体分压和冷指在冷却液温度下的暴露时间都很敏感。 5.9 该程序对各种转移操作期间以及溶剂在蒸汽浴上加热蒸发过程中可能发生的任何样品损失非常敏感。 注1: 溶剂和冷凝液之间可能发生反应,并影响分析。
1.1 This practice covers a technique for collecting samples of materials that are part of the residual gas environment of an evacuated vacuum chamber. The practice uses a device designated as a “cold finger” that is placed within the environment to be sampled and is cooled so that constituents of the environment are retained on the cold-finger surface. 1.2 The practice covers a method for obtaining a sample from the cold finger and determining the weight of the material removed from the cold finger. 1.3 The practice contains recommendations as to ways in which the sample may be analyzed to identify the constituents that comprise the sample. 1.4 By determining the species that constitute the sample, the practice may be used to assist in defining the source of the constituents and whether the sample is generally representative of samples similarly obtained from the vacuum chamber itself. 1.5 This practice covers alternative approaches and usages to which the practice can be put. 1.6 The degree of molecular flux anisotropy significantly affects the assurance with which one can attribute characteristics determined by this procedure to the vacuum chamber environment in general. 1.7 The temperature of the cold finger significantly affects the quantity and species of materials collected. 1.8 Units— The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard. 1.9 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. For specific warning statements, see Section 8 . 1.10 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee. ====== Significance And Use ====== 5.1 When applied in the case in which there is no test item in the vacuum chamber (such as during bake-out operations), this procedure may be used to evaluate the performance of the vacuum chamber in relation to other data from the same or other chambers given that critical parameters (for example, length of exposure, temperature of the chamber and cold finger, anisotropy, and so forth) can be related. 5.2 The procedure can be used to evaluate the effects of materials found in the residue on items placed in the vacuum chamber. 5.3 The procedure can be used to describe the effect of a prior test on the residual gases within a vacuum chamber. 5.4 By selecting the time at which the coolant is introduced into the cold finger, the environment present during a selected portion of a test can be characterized. This can be used to determine the relative efficacy of certain vacuum chamber procedures such as bake-out. 5.5 The procedure may be used to define the outgassed products of a test item that condense on the cold finger. 5.6 The procedure may be used in defining the relative cleanliness of a vacuum chamber. 5.7 In applying the results of the procedure to the vacuum chamber in general, consideration must be given to the anisotropy of the molecular fluxes within the chamber. 5.8 The procedure is sensitive to both the partial pressures of the gases that form the condensibles and the time of exposure of the cold finger at coolant temperatures. 5.9 The procedure is sensitive to any losses of sample that may occur during the various transfer operations and during that procedure wherein the solvent is evaporated by heating it on a steam bath. Note 1: Reactions between solvent and condensate can occur and would affect the analysis.
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归口单位: E21.05
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