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Cleanrooms and associated controlled environments - Part 18: Assessment of suitability of consumables (ISO/FDIS 14644-18:2023) 洁净室和相关受控环境第18部分:消耗品适用性的评估
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归口单位: CEN/TC 243
相似标准/计划/法规
现行
EN ISO 14644-18-2023
Cleanrooms and associated controlled environments - Part 18: Assessment of suitability of consumables (ISO 14644-18:2023)
洁净室和相关受控环境第18部分:消耗品适用性的评估
2023-10-25
现行
ISO 14644-18-2023
Cleanrooms and associated controlled environments — Part 18: Assessment of suitability of consumables
洁净室和相关受控环境第18部分:耗材适用性评估
2023-10-16
现行
ISO 14644-15-2017
Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
洁净室和相关的受控环境 - 第15部分:评估空气中化学品浓度对设备和材料的适用性
2017-10-26
现行
KS I ISO 14644-14(2023 Confirm)
클린룸 및 제어된 환경 — 제14부: 공기 부유 입자 농도에 따른 장비 적합성 평가
洁净室和相关受控环境第14部分:通过空气中颗粒浓度对设备适用性的评估
2018-05-08
现行
ISO 14644-14-2016
Cleanrooms and associated controlled environments — Part 14: Assessment of suitability for use of equipment by airborne particle concentration
洁净室和相关受控环境 - 第14部分:空气中颗粒浓度对设备使用适用性的评估
2016-09-14
现行
KS I ISO 14644-15
클린룸 및 제어된 환경 — 제15부: 공기 중 화학물질 농도에 따른 사용 장비 및 자재 적합성 평가
洁净室和相关的受控环境.第15部分:用空气中的化学浓度评估设备和材料的适用性
2019-06-13
现行
EN ISO 14644-14-2016
Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2016)
洁净室和相关的受控环境 - 第14部分:空气中颗粒浓度使用设备的适用性评估(ISO 14644-14:2016)
2016-10-05
现行
KS I ISO 14644-14
클린룸 및 제어된 환경 — 제14부: 공기 부유 입자 농도에 따른 장비 적합성 평가
洁净室和相关控制环境 - 第14部分:通过机载颗粒浓度评估设备使用的适用性
2018-05-08
现行
EN ISO 14644-15-2017
Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO 14644-15:2017)
洁净室和相关的受控环境 - 第15部分:评估空气中化学品浓度使用设备和材料的适用性(ISO/DIS 14644-15:2016)
2017-12-06
现行
DIN EN ISO 14644-15
Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO 14644-15:2017)
洁净室和相关受控环境.第15部分:通过气载化学浓度评估设备和材料的适用性(ISO 14644-15-2017)
2018-03-01
现行
DIN EN ISO 14644-14
Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2016)
洁净室和相关受控环境第14部分:通过空气中颗粒物浓度评估设备的适用性(ISO 14644-14-2016)
2017-01-01