A MICRO ELECTRO-DISCHARGE MACHINE WITH HIGH ACCURACY HAS BEEN DEVELOPED. IT CAN BE USED TO MAKE MICRO SHAFTS AND MICRO HOLES AND MANY OTHER SHAPES AS WELL. IT CAN BE USED NOT ONLY TO MACHINE CONDUCTOR MATERIALS, SUCH AS METAL, BUT CAN ALSO MACHINE SEMICONDUCTOR, SUCH AS DIFFERENT TYPES OF SILICON WAFERS. THIS PAPER GIVES SOME MACHINING EXAMPLES TO DESCRIBE WHAT MICRO-EDM CAN DO, POINTS OUT THE FEATURES OF MICRO-EDM, DISCUSSES THE BASIC TECHNOLOGIES USED IN MICRO-EDM, AND GIVES AN APPLICATION EXAMPLE.