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Micro-Edm 微细电火花加工
发布日期: 1991-06-01
研制了一种高精度的微型电火花加工机。它可以用来制作微型轴、微型孔和许多其他形状。它不仅可以用来加工导体材料,如金属,还可以加工半导体,如不同类型的硅片。本文给出了一些加工实例来描述微细电火花加工的功能,指出了微细电火花加工的特点,讨论了微细电火花加工的基本技术,并给出了应用实例。
A MICRO ELECTRO-DISCHARGE MACHINE WITH HIGH ACCURACY HAS BEEN DEVELOPED. IT CAN BE USED TO MAKE MICRO SHAFTS AND MICRO HOLES AND MANY OTHER SHAPES AS WELL. IT CAN BE USED NOT ONLY TO MACHINE CONDUCTOR MATERIALS, SUCH AS METAL, BUT CAN ALSO MACHINE SEMICONDUCTOR, SUCH AS DIFFERENT TYPES OF SILICON WAFERS. THIS PAPER GIVES SOME MACHINING EXAMPLES TO DESCRIBE WHAT MICRO-EDM CAN DO, POINTS OUT THE FEATURES OF MICRO-EDM, DISCUSSES THE BASIC TECHNOLOGIES USED IN MICRO-EDM, AND GIVES AN APPLICATION EXAMPLE.
分类信息
发布单位或类别: 日本-日本船用装置工业会
关联关系
研制信息
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