ISO 14644-15:2017提供了评估预计用于洁净室和相关受控环境的设备和材料的化学气载清洁度的要求和指南，这些设备和材料与ISO标准的化学浓度清洁度等级有关（见ISO 14644-8）。 以下内容不在ISO 14644-15:2017的范围内: -健康和安全要求； -与清洁剂和技术的兼容性； -清洁性； -生物污染； -工艺和产品对设备和材料的具体要求； -设备的设计细节。

ISO 14644-15:2017 provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (see ISO 14644？8). The following are outside the scope of ISO 14644-15:2017: - health and safety requirements; - compatibility with cleaning agents and techniques; - cleanability; - biocontamination; - specific requirements of equipment and materials for processes and products; - design details of equipment.