Cleanrooms and associated controlled environments-Classification of air cleanliness by particle concentration
洁净室和相关受控环境
发布日期:
2016-01-31
BS EN ISO 14644-1:2015规定了空气清洁度在空气中污染物浓度方面的分类
洁净室和洁净区内的颗粒物;以及ISO 14644-7中定义的分离装置。仅粒子总体具有基于阈值(下限)粒子的累积分布
出于分类目的,考虑0.1µm至5µm的尺寸。光散射(离散)空气颗粒计数器(LSAPC)的使用是测定的基础
在指定的温度下,等于或大于规定尺寸的空气颗粒浓度
采样地点。ISO 14644的这一部分没有规定在标准范围之外的粒子群的分类
规定的较低阈值粒度范围,0.1µm至5µm。超细颗粒的浓度
(小于0.1µm的颗粒)将在单独的标准中处理,以规定空气清洁度
通过纳米尺度的粒子。M描述符(见附录C)可用于量化
大颗粒(大于5µm的颗粒)。ISO 14644的这一部分不能用于描述物理、化学、辐射、可生存或可生存的环境
空气中颗粒物的其他性质。交叉引用:ISO 14644-2:2015ISO 14644-7ISO 21501-4:2007ASTM F312-08IEST-G-CC1003IEST-G-CC1004JIS B 9920:2002购买本文件时提供的所有现行修订版均包含在购买本文件中。
BS EN ISO 14644-1:2015 specifies the classification of air cleanliness in terms of concentration of airborne
particles in cleanrooms and clean zones; and separative devices as defined in ISO 14644-7.Only particle populations having cumulative distributions based on threshold (lower limit) particle
sizes ranging from 0,1 µm to 5 µm are considered for classification purposes.The use of light scattering (discrete) airborne particle counters (LSAPC) is the basis for determination
of the concentration of airborne particles, equal to and greater than the specified sizes, at designated
sampling locations.This part of ISO 14644 does not provide for classification of particle populations that are outside the
specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of ultrafine particles
(particles smaller than 0,1 µm) will be addressed in a separate standard to specify air cleanliness
by nano-scale particles. An M descriptor (see Annex C) may be used to quantify populations of
macroparticles (particles larger than 5 µm).This part of ISO 14644 cannot be used to characterize the physical, chemical, radiological, viable or
other nature of airborne particles.Cross References:ISO 14644-2:2015ISO 14644-7ISO 21501-4:2007ASTM F312-08IEST-G-CC1003IEST-G-CC1004JIS B 9920:2002All current amendments available at time of purchase are included with the purchase of this document.