The charge modulated electrochemical machining (CM-ECM) process is controlled by a charge modulated electric field waveform. It improves metal removal rate, dimensional accuracy, and surface quality in machining and finishing of difficult-to-cut materials, like hard, passive materials such as nickel-base alloys and aluminum casting alloys. This paper presents an effective surface finishing process for hard, passive alloys using the CM-ECM process to remove the damaged surface layer, defects, or edge burrs left by prior manufacturing processing. The experimental results indicate that the CM-ECM process can be used for variety of surface finishing such as polishing and deburring for different materials.