现行

GB/T 12964-2018

硅单晶抛光片
Monocrystalline silicon polished wafers

2018-09-17

现行

YS/T 1167-2016

硅单晶腐蚀片
Monocrystalline silicon etched wafers

2016-07-11

现行

GB/T 12965-2018

硅单晶切割片和研磨片
Monocrystalline silicon as cut wafers and lapped wafers

2018-09-17

现行

GB/T 29506-2013

300mm 硅单晶抛光片
300mm polished monocrystalline silicon wafers

2013-05-09

现行

GB/T 30656-2023

碳化硅单晶抛光片
Polished monocrystalline silicon carbide wafers

2023-03-17

现行

GB/T 26071-2018

太阳能电池用硅单晶片
Monocrystalline silicon wafers for solar cells

2018-09-17

现行

SJ/T 11502-2015

碳化硅单晶抛光片规范
Specification for polished monocrystalline silicon carbide wafers

2015-04-30

现行

GB/T 32278-2015

碳化硅单晶片平整度测试方法
Test methods for flatness of monocrystalline silicon carbide wafers

2015-12-10

现行

GB/T 30866-2014

碳化硅单晶片直径测试方法
Test method for measuring diameter of monocrystalline silicon carbide wafers

2014-07-24

现行

SJ/T 11503-2015

碳化硅单晶抛光片表面粗糙度的测试方法
Test methods for measuring surface roughness of polished monocrystalline silicon carbide wafers

2015-04-30

现行

GB/T 31351-2014

碳化硅单晶抛光片微管密度无损检测方法
Nondestructive test method for micropipe density of polished monocrystalline silicon carbide wafers

2014-12-31

现行

SJ 21441-2018

SiC-HPSI 型高纯半绝缘碳化硅单晶片规范
Specification for high purity semi-insulating silicon carbide monocrystalline wafers of SiC-HPSI

2018-01-18

现行

GB/T 30867-2014

碳化硅单晶片厚度和总厚度变化测试方法
Test method for measuring thickness and total thickness variation of monocrystalline silicon carbide wafers

2014-07-24

现行

GB/T 30868-2014

碳化硅单晶片微管密度的测定 化学腐蚀法
Test method for measuring micropipe density of monocrystalline silicon carbide wafers―Chemically etching

2014-07-24

现行

GB/T 41325-2022

集成电路用低密度晶体原生凹坑硅单晶抛光片
Low density crystal originated pit polished monocrystalline silicon wafers for integrated circuit

2022-03-09