BS ISO 17973:2016规定了螺旋钻动能刻度的校准方法 不确定度为3 eV的电子光谱仪，用于识别元素的一般分析用途 在表面上。此外，它还规定了建立校准计划的方法。这是适用的 分辨率等于或小于直接模式下使用的仪器 0.5%，差分模式的调制幅度（如果使用）为2 eV峰间。它是 适用于配有惰性气体离子枪或其他取样方法的光谱仪 使用能够在4keV或更高光束能量下工作的电子枪进行清洁和清洗。交叉引用:ISO 18115ISO 17974购买本文件时可获得的所有现行修订均包含在购买本文件中。

BS ISO 17973:2016 specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. In addition, it specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.Cross References:ISO 18115ISO 17974All current amendments available at time of purchase are included with the purchase of this document.