Surface chemical analysis — High-resolution Auger electron spectrometers — Calibration of energy scales for elemental and chemical-state analysis
表面化学分析——高分辨率俄歇电子能谱仪——元素和化学状态分析用能量标度的校准
发布日期:
2002-10-17
ISO 17974:2002规定了一种校准用于表面元素和化学状态分析的俄歇电子光谱仪动能标度的方法。它还规定了校准时间表,用于测试一个中间能量下的动能标度线性,用于确认一个低动能值和一个高动能值下标度校准的不确定性,用于校正该标度的小漂移,并定义95%置信水平下动能标度校准的扩展不确定性(该不确定性包括实验室间研究中观察到的行为的贡献,但不包括所有可能的缺陷)。
它仅适用于那些装有用于溅射清洗的离子枪的仪器。不适用于动能刻度误差显著非-与能量线性,在恒定δ E/E模式下以低于0.2%的相对分辨率或在恒定δ E模式下以1.5 eV的相对分辨率操作的那些,那些需要正负0.05 eV或更小的容差极限的那些,也不是那些具有不能在5 keV至10 keV的能量范围内操作的电子枪的那些。它不提供完整的校准检查来确认在能量秤上的每个可寻址点测量的能量,这是根据制造商的建议执行的。
ISO 17974:2002 specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers used for elemental and chemical state analysis at surfaces. It also specifies a calibration schedule for testing the kinetic energy scale linearity at one intermediate energy, for confirming the uncertainty of the scale calibration at one low and one high kinetic energy value, for correcting for small drifts of that scale and defining the expanded uncertainty of the calibration of the kinetic energy scale for a confidence level of 95 % (with this uncertainty including contributions for behaviours observed in interlaboratory studies but not covering all possible defects).
It is applicable only to those instruments incorporating an ion gun for sputter cleaning. It is not applicable to instruments with kinetic energy scale errors significantly non-linear with energy, those operated at relative resolutions poorer than 0,2 % in the constant delta E/E mode or 1,5 eV in the constant delta E mode, those requiring tolerance limits of plus or minus 0,05 eV or less, nor those with an electron gun that cannot be operated in the energy range 5 keV to 10 keV. It does not provide a full calibration check for confirming the energy measured at each addressable point on the energy scale, this being performed according to the manufacturer's recommendations.