ISO 14594:2003给出了在进行电子探针显微分析时需要考虑的与主光束、波长分光计和样品有关的实验参数测定的一般指南。它还定义了确定束流、电流密度、死区时间、波长分辨率、背景、分析区域、分析深度和分析体积的程序。 ISO 14594:2003旨在使用正常光束入射对抛光良好的样品进行分析，获得的参数可能仅用于其他实验条件。

ISO 14594:2003 gives the general guidelines for the determination of experimental parameters relating to the primary beam, the wavelength spectrometer and the sample that need to be taken into account when carrying out electron probe microanalysis. It also defines procedures for the determination of beam current, current density, dead time, wavelength resolution, background, analysis area, analysis depth and analysis volume. ISO 14594:2003 is intended for the analysis of a well-polished sample using normal beam incidence, and the parameters obtained may only be indicative for other experimental conditions.