这份文件定义了表征能量色散X的最重要的量？射线光谱仪由半导体探测器、前置放大器和信号处理单元组成。本文件仅适用于采用固态电离原理工作的半导体探测器的光谱仪。本文件规定了安装在扫描电子显微镜（SEM）或电子探针微量分析仪（EPMA）上的此类光谱仪的最低要求以及如何检查相关仪器性能参数。用于实际分析的程序在ISO 22309[2]和ASTM E1508[3]中有概述，超出了本文件的范围。

This document defines the most important quantities that characterize an energy-dispersive X？ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts. This document is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization. This document specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA). The procedure used for the actual analysis is outlined in ISO 22309^[2] and ASTM E1508^[3] and is outside the scope of this document.