现行

GB/T 14139-2019

硅外延片
Silicon epitaxial wafers

2019-06-04

现行

GB/T 14015-1992

硅-蓝宝石外延片
Silicon on sapphire epitaxial wafers

1992-12-28

现行

GB/T 43885-2024

碳化硅外延片
Silicon carbide epitaxial wafers

2024-04-25

现行

GB/T 35310-2017

200mm硅外延片
200mm silicon epitaxial wafer

2017-12-29

现行

GB/T 42902-2023

碳化硅外延片表面缺陷的测试 激光散射法
Test method for surface defects on silicon carbide epitaxial wafers—Laser scattering method

2023-08-06

现行

GB/T 14142-2017

硅外延层晶体完整性检验方法 腐蚀法
Test method for crystallographic perfection of epitaxial layers in silicon—Etching technique

2017-09-29

现行

DL/T 2310-2021

电力系统高压功率器件用碳化硅外延片使用条件
Acceptance specification for silicon carbide epitaxial wafer of high voltage power devices in the grid system

2021-04-26

现行

GB/T 42905-2023

碳化硅外延层厚度的测试 红外反射法
Test method for thickness of silicon carbide epitaxial layer—Infrared reflectance method

2023-08-06

现行

GB/T 14146-2021

硅外延层载流子浓度的测试 电容-电压法
Test method for carrier concentration of silicon epitaxial layers—Capacitance-voltage method

2021-05-21

现行

SJ/T 10481-1994

硅外延层电阻率的面接触三探针方法
Test method for resistivity of silicon epitaxial layers by area contacts three-probe techniques

1994-04-11

现行

GB/T 25188-2010

硅晶片表面超薄氧化硅层厚度的测量X射线光电子能谱法
Thickness measurements for ultrathin silicon oxide layers on silicon wafers X-ray photoelectron spectroscopy

2010-09-26

现行

GB/T 14847-2010

重掺杂衬底上轻掺杂硅外延层厚度的红外反射测量方法
Test mothod for thickness of lightly doped silicon epitaxial layers on heavily doped silicon substrates by infrared reflectance

2011-01-10

现行

GB/T 14141-2009

硅外延层、扩散层和离子注入层薄层电阻的测定 直排四探针法
Test method for sheet resistance of silicon epitaxial, diffused and ion-implanted layers using a collinear four-probe array

2009-10-30