1.1 本试验方法建立了测试超高纯度气体分配系统中使用的部件的离子和有机表面残留物的程序。 1.2 本试验方法适用于含有气态电子级材料的在线元件。 1.3 限制: 1.3.1 本试验方法受到检测仪器灵敏度和提取溶剂中可用纯度水平的限制。虽然离子色谱法和气相色谱法是定量的，但傅立叶变换红外光谱法（FTIR）可以用作定性或定量工具。此外，气相色谱（GC）和傅立叶变换红外光谱（FTIR）方法用于检测残留在组件内表面的碳氢化合物和卤化物质。 这就从该试验方法中消除了根据总碳氢化合物试验分析的具有高蒸气压的材料。 1.3.2 本试验方法适用于在相当于十二个月经验的水平上理解仪器使用的操作员。 1.4 以国际单位制表示的数值将被视为标准。括号中的英寸-磅单位仅供参考。 1.5 本标准并非旨在解决与其使用相关的所有安全问题（如有）。本标准的用户有责任在使用前制定适当的安全、健康和环境实践，并确定监管限制的适用性。 第节给出了具体的危险说明 6. . 1.6 本国际标准是根据世界贸易组织技术性贸易壁垒（TBT）委员会发布的《关于制定国际标准、指南和建议的原则的决定》中确立的国际公认标准化原则制定的。 ====意义和用途====== 4.1 本试验方法的目的是确定一个程序，用于测试电抛光不锈钢部件，以安装到高纯度气体分配系统中。本试验方法的应用预计将在为本装置鉴定而测试的部件之间产生可比数据。 图1 离子/有机贡献数据表图解 图2 离子/有机贡献数据表图解

1.1 This test method establishes a procedure for testing components used in ultra-high-purity gas distribution systems for ionic and organic surface residues. 1.2 This test method applies to in-line components containing electronics grade materials in the gaseous form. 1.3 Limitations: 1.3.1 This test method is limited by the sensitivity of the detection instruments and by the available levels of purity in extracting solvents. While the ion and gas chromatographic methods are quantitative, the Fourier transform infrared spectroscopy (FTIR) method can be used as either a qualitative or a quantitative tool. In addition, the gas chromatography (GC) and FTIR methods are used to detect hydrocarbons and halogenated substances that remain as residues on component internal surfaces. This eliminates those materials with high vapor pressures, which are analyzed per the total hydrocarbons test, from this test method. 1.3.2 This test method is intended for use by operators who understand the use of the apparatus at a level equivalent to twelve months of experience. 1.4 The values stated in SI units are to be regarded as the standards. The inch-pound units given in parentheses are for information only. 1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6 . 1.6 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee. ====== Significance And Use ====== 4.1 The purpose of this test method is to define a procedure for testing electropolished stainless steel components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for the purposes of qualification for this installation. FIG. 1 Ionic/Organic Contribution Data Table Illustration FIG. 2 Ionic/Organic Contribution Data Table Illustration