本国际标准提供了电子探针元素图谱分析程序，使用 波长色散光谱法。电子束数字化移动时的映射选择 在整个样本中（电子束映射）和仅带有台移动的映射（大面积映射）是 评估。它描述了五种类型的数据处理:原始X射线强度数据法、k值法、， 校准方法、相关方法和矩阵校正方法。

This International Standard provides procedures for electron microprobe elemental-mapping analysis using wavelength-dispersive spectrometry. The choice between mapping with the electron beam moving digitally across the specimen (electron beam mapping) and mapping with stage movement only (large-area mapping) is assessed. It describes five types of data processing: the raw X？ray intensity data method, the k？value method, the calibration method, the correlation method and the matrix correction method.