IEC/TS 62622:2012（E）是一项技术规范，它规定了人工光栅全局和局部质量参数的通用术语，根据光栅特征的标称位置偏差进行解释，并为测量和评估方法的分类提供了指导。本规范旨在促进制造商、用户和校准实验室之间就纳米技术中使用的人造光栅的尺寸质量参数进行沟通。 本规范支持在纳米技术不同应用领域生产和使用人造光栅的质量保证。虽然定义和描述的方法适用于各种不同的光栅，但重点是一维（1D）和二维（2D）光栅。

IEC/TS 62622:2012(E), which is a technical specification, specifies the generic terminology for the global and local quality parameters of artificial gratings, interpreted in terms of deviations from nominal positions of grating features, and provides guidance on the categorization of measurement and evaluation methods for their determination. This specification is intended to facilitate communication among manufacturers, users and calibration laboratories dealing with the characterization of the dimensional quality parameters of artificial gratings used in nanotechnology. This specification supports quality assurance in the production and use of artificial gratings in different areas of application in nanotechnology. Whilst the definitions and described methods are universal to a large variety of different gratings, the focus is on one-dimensional (1D) and two-dimensional (2D) gratings.