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历史 ASTM E493-06
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Standard Test Methods for Leaks Using the Mass Spectrometer Leak Detector in the Inside-Out Testing Mode 用质谱仪检漏仪在内外测试模式下进行泄漏的标准试验方法
发布日期: 2006-02-01
1.1这些测试方法涵盖了在测试之前密封的设备的测试程序,例如半导体、密封继电器、烟火设备等,以检测外壳壁的泄漏。它们可以以不同的灵敏度使用(取决于内部体积、外壳的强度、准备测试的可用时间以及外壳材料对氦的吸附特性)。在一般实践中,灵敏度限值为4.4 10 15 至4.4 10 11 摩尔/秒(10 9 标准cm 3. /s到10 5. 标准cm 3. /尽管在某些情况下,在任何方向上都可能超过这些极限几十年。 1.2描述了两种试验方法: 1.2.1试验方法A通过轰炸制备试验零件。 1.2.2试验方法B通过预填充制备试验零件。 本标准并非旨在解决与其使用相关的所有安全问题(如有)。本标准的用户有责任在使用前制定适当的安全和健康实践,并确定监管限制的适用性。 ====意义和用途====== 方法A或B适用于测试具有内部体积的密封装置。已确定微电子设备的最大可接受泄漏率,以确保性能特性在预期寿命内不会受到空气、水蒸气或其他污染物泄漏的影响。必须注意控制轰炸压力、轰炸时间和轰炸后的停留时间,否则结果可能会发生很大变化。
1.1 These test methods cover procedures for testing devices that are sealed prior to testing, such as semiconductors, hermetically enclosed relays, pyrotechnic devices, etc., for leakage through the walls of the enclosure. They may be used with various degrees of sensitivity (depending on the internal volume, the strength of the enclosure, the time available for preparation of test, and on the sorption characteristics of the enclosure material for helium). In general practice the sensitivity limits are from 4.4 10 15 to 4.4 10 11 moles/s (10 9 standard cm 3 /s to 10 5 standard cm 3 /s at 0C) for helium, although these limits may be exceeded by several decades in either direction in some circumstances. 1.2 Two test methods are described: 1.2.1 Test Method ATest part preparation by bombing. 1.2.2 Test Method BTest part preparation by prefilling. This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. ====== Significance And Use ====== Methods A or B are useful in testing hermetically-sealed devices with internal volumes. Maximum acceptable leak rates have been established for microelectronic devices to assure performance characteristics will not be affected by in-leakage of air, water vapor or other contaminants over the projected life expected. Care must be taken to control the bombing pressure, bombing time and dwell time after bombing or the results can vary substantially.
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归口单位: E07.08
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