IEC 62047-4:2008描述了由半导体制成的微机电系统（MEMS）的通用规范，这些通用规范是本系列其他部分中给出的各种类型MEMS应用规范的基础，如传感器、RF MEMS，不包括光学MEMS、生物MEMS、微TA和电力MEMS。本标准规定了IECQ-CECC系统中使用的质量评估的一般程序，并建立了描述和测试电气、光学、机械和环境特性的一般原则。IEC 62047-4:2008有助于制定标准，定义由微机械技术制造的设备和系统，包括但不限于材料特性和处理、组装和测试、过程控制和测量方法。 本标准中描述的MEMS基本上由半导体材料制成。然而，本标准中的声明也适用于使用非半导体材料的MEMS，例如聚合物、玻璃、金属和陶瓷材料。

IEC 62047-4:2008 describes the generic specifications for micro-electromechanical systems (MEMS) made by semiconductors, which are the basis for specifications given in other parts of this series for various types of MEMS applications such as sensors, RF MEMS, excluding optical MEMS, bio MEMS, micro TAS, and power MEMS. This standard specifies general procedures for quality assessment to be used in IECQ-CECC systems and establishes general principles for describing and testing of electrical, optical, mechanical and environmental characteristics. IEC 62047-4:2008 aids in the preparation of standards that define devices and systems made by micromachining technology, including but not limited to, material characterization and handling, assembly and testing, process control and measuring methods. MEMS described in this standard are basically made of semiconductor material. However, the statements made in this standard are also applicable to MEMS using materials other than semiconductor, for example, polymers, glass, metals and ceramic materials.