本文件涵盖了根据空气中纳米颗粒的浓度通过颗粒监测空气清洁度。出于监测目的，仅考虑粒径下限为0.1微米（100纳米）或更小“纳米级”的粒子群。本文件中给出的监控主要用于“运行”状态。注1:本文件中提到的“纳米颗粒”，是指在纳米尺度上具有一个（纳米板）、两个（纳米纤维）或三个（纳米颗粒）尺寸的所有纳米物体。 注2:因此，通过洁净室在运行状态下的纳米颗粒浓度监测空气清洁度的规范也考虑了工艺细节，如使用过的设备、人员行为等。注3本文件不包括健康和安全考虑因素。

This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less "nanoscale" are considered.The monitoring given in this document is for use mainly in "operational" states.NOTE 1 For the purposes of this document, reference is made to "nanoscale particles", which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale.NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc.NOTE 3 Health and safety considerations are excluded from this document.