请注意:此版本的所有临时修订版将在您购买时提供。这些要求涵盖了测量半导体湿工作台工具结构中使用的片状塑料防火性能的试验方法。归类为1级或2级的塑料材料在不使用洒水器的情况下，火灾传播有限。所测试的结构或条件的变化能够显著改变塑料的性能特征。本标准不适用于评估半导体工具结构中使用的小型塑料部件，如管子或电线。本标准不测量塑料的机械或结构性能，也不测量塑料产生的烟雾的危害 塑料材料。包含新特性、特性、组件、材料或系统的产品，或与本标准要求涵盖的特性、特性、组件、材料或系统不同的产品 涉及火灾、触电或人身伤害的风险，应使用适当的附加组件和最终产品要求进行评估，以保持 本标准意图最初预期的安全水平。其特征、特性、组件、材料或系统与 本标准的具体要求或规定不符合本标准。要求的修订应按照以下要求提出和采用: 制定、修订和实施本标准所采用的方法。

Please note: All interim revisions for this edition available at time of your purchase will be included.These requirements cover the test methods for measuring the fire performance of sheet plastics used in semi-conductor wet bench tool construction.Plastic materials that are classified as Class 1 or Class 2 demonstrate limited fire propagation without the use of sprinklers.Variations from the construction or conditions that are tested are capable of substantially changing the performance characteristics of the plastic.This standard is not intended for evaluation of small plastic components used in semi-conductor tool constructions such as tubing or wiring.This standard does not measure mechanical or structural properties of plastic, and this standard does not measure the hazards from the smoke generated by the plastic material.A product that contains features, characteristics, components, materials, or systems new or different from those covered by the requirements in this standard, and that involves a risk of fire or of electric shock or injury to persons shall be evaluated using appropriate additional component and end-product requirements to maintain the level of safety as originally anticipated by the intent of this standard. A product whose features, characteristics, components, materials, or systems conflict with specific requirements or provisions of this standard does not comply with this standard. Revision of requirements shall be proposed and adopted in conformance with the methods employed for development, revision, and implementation of this standard.