微细电火花加工作为一种微细加工方法，可用于高精度加工任何导电材料的三维微零件、微模具或模具。加工形状可以是简单的微孔，也可以是复杂的3D型腔。然而，复杂微三维形状的生成需要昂贵、耗时且困难的设计和制造程序来制备复杂形状的电极。为了使用简单形状的电极正确加工复杂的3D形状，需要解决两个问题。一个是电极磨损，另一个是CAD/CAM系统的应用。 本文采用最近发展起来的均匀磨损方法来解决电极磨损问题，并提出了一种将均匀磨损方法与CAD/CAM系统集成的新方法。通过对一些复杂微腔的加工，验证了该方法的有效性。

Micro EDM, as one of micromachining methods, can be used to machine 3D micro parts, micro die or molds of any conductive materials with high precision. The machined shapes can range from simple micro holes to complex 3D cavities. However, the generation of complex micro 3D shapes requires costly, time consuming and difficult design and fabrication procedures of preparing the complex shaped electrodes. To machine complex 3D shapes correctly using simple shaped electrodes, it is necessary to solve two problems. One is the electrode wear and the other is the application of a CAD/CAM system. In this paper, the recently developed uniform wear method is used to solve the problem of electrode wear and a new approach is proposed to integrate the uniform wear method with the CAD/CAM system. The proposed approach is verified by successfully machining some complex micro cavities.