Test Method for Effective Pumping Speed of Vacuum Chamber Systems (Withdrawn 2000)
真空室系统有效泵送速度的试验方法(2000年撤销)
发布日期:
1999-01-01
废止日期:
2000-05-10
1.1本试验方法涵盖了整个真空室系统有效泵速的测量。该试验方法适用于在低于1 X 10的压力下运行的所有类型的真空系统
torr和大于约10英尺的腔室
(0.3米
).
1.2以英寸-磅为单位的数值应视为标准值。
1.3本标准无意解决与其使用相关的所有安全问题(如有)。本标准的用户有责任在使用前制定适当的安全和健康实践,并确定监管限制的适用性。
1.1 This test method covers the measurement of effective pumping speed of complete vacuum-chamber systems. The test method is suitable for all types of vacuum systems operating at pressures below 1 X 10
torr and for chambers larger than approximately 10 ft
(0.3 m
).
1.2 The values stated in inch-pound units are to be regarded as the standard.
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.