ISO 22278:2020-精细陶瓷（高级陶瓷高级工业陶瓷）.用平行X射线束X射线衍射法测定单晶薄膜（晶片）结晶质量的试验方法-国家数字标准馆

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Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam 精细陶瓷（高级陶瓷高级工业陶瓷）.用平行X射线束X射线衍射法测定单晶薄膜（晶片）结晶质量的试验方法

发布日期： 2020-08-24

本文件规定了使用平行X射线束X射线衍射法测量单晶薄膜（晶圆）结晶质量的试验方法。本文件适用于所有作为块体或外延层结构的单晶薄膜（晶圆）。

This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.

分类信息

发布单位或类别：国际组织-国际标准化组织

ICS分类： 81.060.30陶瓷 - 高级陶瓷

关联关系

研制信息

归口单位： ISO/TC 206

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