Gas cylinders. Gas cylinder valve connections for use in the microelectronics industry-Specification and type testing for valve to cylinder connections
气瓶 微电子工业用气瓶阀门连接件 阀门与气缸连接的规范和型式试验
发布日期:
2001-09-06
交叉引用:EN 849EN 962ISO 10297ISO 11114-1:1997ISO 11114-2:2000ISO 11114-3:1997EN ISO 11114-1:1997EN ISO 11114-2:2000EN ISO 11114-3:1997ISO 11117:1998
Cross References:EN 849EN 962ISO 10297ISO 11114-1:1997ISO 11114-2:2000ISO 11114-3:1997EN ISO 11114-1:1997EN ISO 11114-2:2000EN ISO 11114-3:1997ISO 11117:1998