由于整个产品组的小型化以及微机械元件与创新产品的集成，对所用的制造技术提出了新的要求。尤其是在成形技术领域，几乎没有任何技术可以让你生产出所需的工具，在大的总表面上具有非常细的结构，经济且具有足够的精度。本文展示了应用的潜力-用于生产微结构成型工具的EDM。使用不同的模具和模具制造材料来研究和比较该工艺的应用- 电火花线切割、微凹模电火花加工和微路径编程电火花加工。

Due to the miniaturization of complete product groups and the integration of micromechanical elements into innovative products, new demands are placed on the used manufacturing technologies. Particularly in the field of forming techniques there are hardly any technologies that permit you to produce the required tools, with very filigreed structures on a large total surface, economically and with sufficient accuracy. This paper shows the potentials of the applications of?-EDM for the production of microstructured forming tools. Different materials of mould and die making are used to investigate and compare the application of the process variants Micro-WEDM, Micro-Die-Sinking-EDM, and Micro-Path-Programmed-EDM.