Surface chemical analysis — Auger electron spectroscopy — Repeatability and constancy of intensity scale
表面化学分析——俄歇电子能谱;强度标度的重复性和恒常性
发布日期:
2005-04-19
ISO 24236:2005规定了一种评估俄歇电子能谱仪强度标度恒定性和可重复性的方法,用于一般分析目的,使用束流能量为2 keV或更大的电子枪。它仅适用于包含用于溅射清洗的离子枪的仪器。它不是强度/能量响应函数的校准。该校准可由仪器制造商或其他组织进行。本程序提供的数据用于评估和确认强度/能量响应函数在仪器使用情况下保持恒定的准确性。对可能影响这种稳定性的一些仪器设置给出了指导。
ISO 24236:2005 specifies a method for evaluating the constancy and repeatability of the intensity scale of Auger electron spectrometers, for general analytical purposes, using an electron gun with a beam energy of 2 keV or greater. It is only applicable to instruments that incorporate an ion gun for sputter cleaning. It is not intended to be a calibration of the intensity/energy response function. That calibration may be made by the instrument manufacturer or other organization. The present procedure provides data to evaluate and confirm the accuracy with which the intensity/energy response function remains constant with instrument usage. Guidance is given on some of the instrumental settings that may affect this constancy.