有几种方法可以从臭氧和/或过氧化氢和紫外线中生成OH自由基。它们都有一个共同点，即OH自由基只起源于一个单一来源，而在臭氧与电离辐射的组合中，存在两个同时产生OH自由基的工作来源。由此产生的较高OH自由基浓度使该工艺特别适合于修复低水平污染地下水，例如亚ppm范围内的三氯乙烯（TCE）污染。O3/UV和O3/电子束修复受100 ppb TCE污染的地下水的成本比较表明，对于约500万加仑/天的吞吐量，O3/电子束工艺更具成本效益。

There are several methods of generating OH free radicals from ozone and/or hydrogen peroxide and ultraviolet light. They all have in common that the OH free radicals originate in one single source only whereas in the combination of ozone with ionizing radiation two simultaneous working sources for the OH free radicals exist. The resulting higher OH free radical concentration makes this process especially apt for the remediation of low level contaminated groundwater as for example trichloroethylene (TCE) contamination in the sub-ppm range. A cost comparison between O3/UV and O3/electron beam for remediation of a groundwater contaminated with 100 ppb TCE indicated that for a throughput of about 5 million gallons/day the O3/electron beam process is more cost-effective.