ISO 13095:2014规定了用于表征AFM探针尖端形状的两种方法，特别是柄和近似尖端轮廓。这些方法将AFM探针尖端的轮廓投影到给定平面上，并且探针柄的特征也在限定的操作条件下投影到该平面上。后者表明给定探头对于窄沟槽和类似剖面中深度测量的有用性。本国际标准适用于半径大于5u0的探头，其中u0是用于表征探头的参考样品中脊结构宽度的不确定度。

ISO 13095:2014 specifies two methods for characterizing the shape of an AFM probe tip, specifically the shank and approximate tip profiles. These methods project the profile of an AFM probe tip onto a given plane, and the characteristics of the probe shank are also projected onto that plane under defined operating conditions. The latter indicates the usefulness of a given probe for depth measurements in narrow trenches and similar profiles. This International Standard is applicable to the probes with radii greater than 5u₀, where u₀ is the uncertainty of the width of the ridge structure in the reference sample used to characterize the probe.