ISO 14952-3:2003提供了取样和分析测试方法，以验证经过精密清洁的零部件的清洁度水平，并确定了可用于验证地面支持设备、运载火箭和航天器清洁度的过程。ISO 14952-3:2003用于对经过精密清洁的零部件的清洁度水平进行取样和验证，同样适用于地面支持设备、运载火箭和航天器中的零部件和系统。

ISO 14952-3:2003 provides sampling and analytical test methods to validate the cleanliness levels of parts and components that have been precision cleaned, and identifies processes that may be used for the verification of cleanliness in ground support equipment, launch vehicles and spacecraft. ISO 14952-3:2003 is used to sample and verify the level of cleanliness of parts and components that have been precision cleaned and applies equally to parts, components and systems in ground support equipment, launch vehicles and spacecraft.