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电离真空计校准规范 Calibration Specification for Ionization Vacuum Gauges
发布日期: 2022-04-29
实施日期: 2022-10-29
本规范适用于测量范围在1×10-9Pa~1×102Pa的电离真空计校准
分类信息
发布单位或类别: 中国-国家计量技术规范
CCS分类: XXXX
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