BS IEC 62047-32:2019-半导体器件微机电设备-国家数字标准馆

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Semiconductor devices. Micro-electromechanical devices-Test method for the nonlinear vibration of MEMS resonators 半导体器件微机电设备

发布日期： 2019-01-29

BS IEC 62047-32:2019规定了非线性振动的试验方法和试验条件
MEMS谐振器的设计。本文件中的声明适用于开发和
MEMS谐振器制造。交叉引用:IEC 62047-1购买本文件时可获得的所有现行修订均包含在购买本文件中。

BS IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration
of MEMS resonators. The statements made in this document apply to the development and
manufacture for MEMS resonators.Cross References:IEC 62047-1All current amendments available at time of purchase are included with the purchase of this document.

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发布单位或类别：英国-英国标准学会

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