ISO/TR 19319:2013描述了:函数及其与横向分辨率的相关性:点扩展函数（PSF）、线扩展函数（LSF）、边缘扩展函数（ESF）、调制传递函数（MTF）和对比度传递函数（CTF）；测定横向分辨率和与横向分辨率有关的参数的实验方法:窄条纹、锐边和方波光栅的成像；在俄歇电子能谱仪和X射线光电子能谱仪中，影响分析仪横向分辨率、分析面积和样品面积的物理因素。

ISO/TR 19319:2013 describes: functions and their relevance to lateral resolution: point spread function (PSF), line spread function (LSF), edge spread function (ESF), modulation transfer function (MTF) and contrast transfer function (CTF); experimental methods for the determination of lateral resolution and parameters related to lateral resolution: imaging of a narrow stripe, sharp edge and square-wave gratings; physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.