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Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges 真空技术.真空计.电容隔膜计的规范 校准和测量不确定度
发布日期: 2019-01-31
本文件定义了与电容式膜片压力计(CDG)相关的术语,规定了CDG必须给出的参数,详细说明了其校准程序,并描述了操作这些压力计时必须考虑的测量不确定性。 在校准CDG并将其用作参考标准时,本文件补充了ISO 3567和ISO 27893。
This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure and describes which measurement uncertainties have to be considered when operating these gauges. This document complements ISO 3567 and ISO 27893 when calibrating CDGs and using them as reference standards.
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归口单位: ISO/TC 112
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