小型半导体器件生产过程中的空气颗粒物可能会导致产品质量低劣，或导致器件完全失效。颗粒物引起的问题的另一个例子是集成电路芯片的一部分存在很大的缺陷。因此，空气清洁度是微型设备制造中非常重要的一部分，使用洁净室是非常可取的。“10级”洁净室是我们最近建造的洁净室，其粒子数不超过每立方英尺0.5微米及以上10个粒子，每立方英尺不超过1个粒子。 0微米及以上。这一新的分类是对联邦标准的拟议补充，将对目前正在接近的良好空气清洁条件进行分类。引文:研讨会，ASHRAE交易，第80卷，第一部分，加利福尼亚州洛杉矶

Airborne particulates in the production of small semiconductor devices can cause a poor quality product, or a device that fails completely. Another example of problems caused by particulate matter would be a very large defect in a portion of an integrated circuit chip. Air cleanliness, therefore, is a very important part in the manufaoture of miniature devices, and the use of clean rooms is highly desirable.A "Class 10" clean room which 1s what is being approached by our most recently built room, would have a particle count which does not exceed 10 particles per cubic foot 0.5 micron and larger, and no more than 1 particle per oubic foot 1.0 micron and larger. This new classification is a proposed addition to the Federal Standard and will classify the excellent air cleanliness conditions that are now being approached.