BS ISO 16700:2016规定了校准图像放大率的方法 使用适当参考材料的扫描电子显微镜（SEM）。这种方法仅限于 由校准标准物质中结构的可用尺寸范围确定的放大率。 本国际标准不适用于专用临界尺寸测量SEM。交叉引用:ISO/IEC 17025:2005 ISO指南30ISO指南34ISO指南35ISO 5725-1ISO/IEC指南98-3GUM:1995购买本文件时提供的所有当前修订版均包含在购买本文件中。

BS ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. This International Standard does not apply to the dedicated critical dimension measurement SEM.Cross References:ISO/IEC 17025:2005ISO Guide 30ISO Guide 34ISO Guide 35ISO 5725-1ISO/IEC Guide 98-3GUM:1995All current amendments available at time of purchase are included with the purchase of this document.