Draft Document - Cleanrooms and associated controlled environments - Part 12: Classification of air cleanliness by nanoscale particle concentration (ISO/DIS 14644-12:2013); German version prEN ISO 14644-12:2013
文件草稿.洁净室和相关受控环境.第12部分:用纳米颗粒浓度对空气清洁度进行分类(ISO/DIS 14644-12-2013);德文版prEN ISO 14644-12:2013